PNG
IHDR =X gAMA a sRGB RiTXtXML:com.adobe.xmp
DAINIPPON SCREEN MFG.CO.,LTD
\ PLTE㻻vvvooo}}}KKKUUUhhh\\\bbb(((999BBB000, IDATx {ΊN( Lݕٻ}߫BHZY i
m ż_\
g Ryo~yr]oef;=[} /h78s0hvyb415pَ|0$2
}vEYPQ1/b6
Ϸ7骵Zz}:z%)(9
/`>ޯg~뮾M0 f:><0gjlA-@-?JmBO༙h6 D;^Uf3 (Bskvi=?,hh;mw4 `yu=0釿W gU<ٞH &"*ueQ䦽tarI/i^.ir# PT[JӿF.ϵ1}j=!p|7̪+ˠ~Y=>(PfU~B X9PB%+뀻G%X$fqa'%ܱ=`x斲ƅ*%Ĝ`0GS̍od"%Q#uZ%
Z>^v)ɷJ֪JL<担$\B ŭǝvOk<~6^{b!¹ie~-G P&3%";/;F$!y3%eʍz>j!\,bNbL^[`+ԛZ[kK4m8_. 3 Z!]twIݞԐ6 lڽ-N|°0,CA"6
%@'LDj&N]ס(nŕI(@u( 3HD̺.,/O-^|t=l5\uO;u-ԭ]~vZl2
ӢmZ;k,4)aigLAΤD'ڹ9<铉n$Hfi;Tq{t/QîP6?)ӟ\;3uc"]~:qgLf;n齘luyD|g8Y&5gۖYTUێ@VޝN65E'yLj
uwERXVEXvDu)WVG*29(h?Qo2viwn(5xw"?qp9}<,>i^er9_R:(s$Iz"לEYW`~/hewye~AWIc1Ϋ<6\|_U֜9(@Dɫb\"PJdP"/.sKij$/JFo9ɛ\a#m QҿZ"\,ӻaWr钏1oΙe^8_. [8{x$P}Rhr:צ4A]Kjsm^·s.9i3wW¤*EeŰ(qggzjE=s)vӄ[+!wWp}R}eƮ)
kP8P ~bQn/z\nkhZT@[l7C8-.ed4 R*dFQ\0b04HkRO& <&!ҶQ Ik9ͳbU)kMͱ6pqpv}|yy)oA_/P9W͡W :X(YLVA5Mb7XljAٻ8cRօro5uԺkTi=Mfڕ\
0o6ঋ8qF(J=Fh|lD({ RY5MCmAV½('6rV
*U#1 @dղtUQ^v6]eF裷"߂_ow$1.[Op==E<O! _ o]{rYuَdóWmqk '7Ѻ崨|UҲ$%8Z+vlgq|sg]Ee5t\l
-7&7Ԍ"Wt'"(O^jwh2Gޕ4'SQU$-DQA25_ϰqƐ74
x*C@Šr<knG\Uv4Ϗo [MedTT&TG}D|{Y''&w.AFA?#/QXXg|*o,WkVx:`P&ܲZp^䘔]!)لPIS2^x
CC uٽ8.j1?zB#Y2mۉn't%=t+K4
>(.]O3oY鶋MFPR_v DyӓiؚYj Wkӏ{u>1el.{zZ&;iza9u%gg.,D'JRg0N[Gwd~ᴝ!^MBc}Hꙶo0amܐ! EeVCAS۬M f<}?`i2PݘR,Lѵ$n['s˱+F,#&H&X!L7Qn|a|s<4Tx`[yS6T(0(2S/z߯z5T-ZBU W,0? WPA{b #)SQHf-LI:N E(FR\}
͐C"~p .XGfv:;E=-@}'@D9mI